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Series II Standard Mass Flow Controller
Brand: Parker HannifinParker's highly precise mass flow controllers provide you the diagnostic stability and repeatability you need for low flow gas applications.
Controlling thermal mass flow rates from 0.6 l/m to 1,670 l/m with high precision and <0.2% repeatability.
Rated for 8 separate gas types which are customer field adjustable.
Our thermal mass flow controller is available in both digital and analog styles, fully compatible with RS232 and digital protocols such as Profibus.
If you're not sure what gas you're going to use or your process changes, our MFC allows you to migrate to a new gas within your flow range without purchasing a new mass flow controller
Features- Fast, Repeatable and Reliable Performance
- Premium Accuracy with Proven Thermal Mass Flow Sensor and Laminar Flow Element
- Easy to integrate into your new or existing systems
- Asset calibration management software included
- Cleaned for analytical use
- Fails shut with Normally Closed Valve for safe operation
- CE, REACH and RoHS II
Specifications
Brand
Approvals & Certifications
- IP40
Attitude Sensitivity
- Maximum
Body Material
- 316L Stainless Steel
Communication Interface
- Analog or Digital: RS-232, DeviceNet, PROFIBUS-DP, Modbus-RTU
Connection Material
- 316L Stainless Steel
Connection Size
- 1/8" - 1/2" / 6 mm - 20 mm
Connection Type
- Compression, Face Seal Male, None, Other
Control Stability
- < ± 0.1 % of Full Scale (Typical for 1 L/minute N₂)
Controllable Pressure Range
- 928 psia - 1450 psia
Electrical Connectors
- 9-Pin D-Connector
Flow Range
- Up to 1670 L/minute
Flow Rate Accuracy
- Standard: ± 0.5 % of Reading Plus ± 0.1 % of Full Scale (± 1 % of Full Scale for Ranges 3 - 5 mL/minute, ± 2 % of Full Scale for Ranges < 3 mL/minute)
Internal Valve Position
- Normally Open, Normally Closed
Leak Integrity (L/sec)
- Tested < 2 x 10-9 Mbar L/sec He
Maximum Operating Temperature (°C)
- 70° C
Minimum Operating Temperature (°C)
- -10° C
Power Consumption
- Maximum
Power Supply
- +15-24 Vdc
Pressure Coefficient (ATM)
- 0.1 ATM Typical N₂, 0.01 % / ATM Typical H₂
Repeatability
- < 0.2 % Reading
Seal Material
- EPDM, Kalrez, Viton (Standard)
Settling Time
- Standard: 2 - 4 seconds
Surface Finish (Ra)
- 0.8 µm Typical
Temperature Coefficient (°C)
- Zero: < 0.05 % of Full Scale/°C, Span: < 0.05 % of Reading/°C
Turndown Accuracy
- 1: 50 (In Digital Mode up to 1:187.5)
Warm-Up Time
- 30 Min for Optimum Accuracy 2 Min for Accuracy ± 2 % of Full Scale
Wetted Materials
- 316L Stainless Steel
- Gas Control for Laboratory and Process Equipment
- Burner Ratio Control for Ceramics and Metals
- Process and Environmental Analyzers
- Emissions Monitors and Calibrators
Documentation
Data Sheets
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