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T-I MAX NH₃
Brand: Tiger Optics, LLCYou can spend a long time “looking” for Airborne Molecular Contaminants (AMCs) when the catastrophic product performance or yield loss is discovered at your device final test stage; or you can deploy Tiger Optics’ T-I Max NH3 analyzer to locate and to monitor these invisible defect generators, commonly found lurking in and around equipment, personnel, wafer carriers and cleanroom bays.
In today’s advanced semiconductor processing, the residual gases, vapors and chemicals emanating from the various materials, accelerated processing operations, and substrate storage and transport have become a critical concern.
So much so that the International Technology Roadmap for Semiconductors (ITRS) now highlights AMC contamination as a key technical challenge in achieving and sustaining low defect rates on devices.
With a particular focus on the major contributors to the “chemical contamination” element of AMCs, the T-I Max NH3 analyzers, based on Tiger’s new global platform, can detect and continuously monitor NH3 with an unprecedented combination of sensitivity, selectivity, and speed of response.
Tiger Optics’ GO-cart for AMCs adds additional flexibility by providing a mobile platform that can be moved quickly to different critical monitoring points.
Features- Sensitive, absolute measurement technique, using Cavity Ring-Down Spectroscopy (CRDS)
- Dramatically improved speed of response and parts-per-trillion detection limits
- Drift-free, with calibration traceable to the world’s leading reference labs
- Lowest cost of ownership – maintenance-free
Specifications
Brand
Detection and Matrix
- NH₃ in Cleanroom Air
Operation Range
- 0 - 40 ppm
Detection Limit (LDL, 3σ@100s)
- 300 ppt
Precision (1σ@100s, greater of)
- ± 0.5 % or 1/3 of LDL
Accuracy at Span
- ± 4 % of Reading
Accuracy at Zero
- ± 300 ppt
Speed of Response at 20 ppb
- < 3 minutes (T10/90+T90/10)
Environmental Conditions
- 10° to 40° C, 10 % to 90 % RH, Non-Condensing
Sample Conditions
- 30 % to 70 % RH at 20° C
- 20 % to 50 % RH at 25° C
- 15 % to 40 % RH at 30° C
Storage Temperature
- -10° to 50° C
Wetted Materials
- Optimized for ppt-level AMCs and fast speed of response
Gas Connections
- 1/4" PFA Swagelok inlet & outlet
Inlet Pressure
- Atmospheric pressure
- Contact us for details about operating the analyzer at elevated inlet pressure
Outlet Pressure
- Vacuum (< 10 Torr)
Flow Rate
- ∼3 slpm @ 1 atm inlet pressure
Sample Gases
- Cleanroom air, clean dry air (CDA) or N₂
Gas Temperature
- Up to 60° C
Standard Sensor
- 8.73" x 8.57" x 23.6" (222 mm x 218 mm x 599 mm)
Sensor Rack
- 8.73" x 19.0" x 23.6" (222 mm x 483 mm x 599 mm)
GO-Cart
- 50" x 23" x 36" (1270 mm x 584 mm x 914 mm)
Weight
- Standard sensor: 33 lb (15 kg)
- GO-cart (Excluding Vacuum Pump): 260 lb (118 kg)
Platform
- Maximum series analyzer
Alarm Indicators
- 2 user programmable, 1 system fault, Form C relays
Power Requirements
- 90-240 Vac 50/60 Hz
Power Consumption
- 40 Watts Max. per sensor
Signal Output
- Isolated 4-20 mA per sensor
User Interfaces
- 5.7" LCD touchscreen, 10/100 Base-T Ethernet
- USB, RS-232, RS-485, Modbus TCP (optional)
Data Storage
- Internal or external flash drive
Certification
- CE Mark
Patents
- U.S. Patent # 7,277,177
- Semiconductor
- Cleanrooms
- Airborne Molecular Contaminants
- Research & Development