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HALO KA H₂O - PPT Detection Limits for H₂O
Brand: Tiger Optics, LLCThe ideal analytical solution for ppt-level detection of H2O in bulk and specialty gases. The HALO KA H2O packs a punch in one all-included compact and affordable package.
Using Tiger Optics’ renowned time-based technology—Cavity Ring-Down Spectroscopy—you can verify moisture impurity levels down to 100 ppt in helium, with drift-free stability and virtually instant response.
You’ll find our system exceptionally fast to install, easy to use and effortless to maintain, with built-in zero verification.
The HALO KA H2O specializes in trace-level moisture detection in bulk gases and specialty gases, as well as gas mixtures, including germane (GeH4) in hydrogen and other specialty mixtures used in semiconductor manufacturing.
Pair the HALO KA H2O with the HALO OK for ppt level oxygen measurement to enjoy the benefits of laser-based technology for both of these critical contaminants.
Features- Compact, affordable and powerful
- Parts per trillion (ppt) moisture detection capability in an array of gases
- Small footprint (two HALO KAs fit in a 19” rack)
- Absolute measurement (freedom from calibration)
- Low cost of ownership and great ease of use
- Wide dynamic range—over four orders of magnitude
- Clean technology
- NOW INCLUDED: Speed+ performance upgrade—intelligent dynamic data processing boosts analyzer’s speed of response while maintaining low noise performance
Specifications
Brand
Detection Limit (LDL, 3σ/24h)
- H₂O in N₂: 300 ppt
- H₂O in SF₆: 400 ppt
- H₂O in NF₃: 600 ppt
- H₂O in CF₄: 800 ppt
- H₂O in C₂F₆: 1200 ppt
- H₂O in C₃F₈: 1200 ppt
- H₂O in HBr: 12 ppb
- H₂O in HCl: 1200 ppt
- H₂O in Cl₂: 650 ppt
- H₂O in Xe: 250 ppt
- H₂O in Kr: 160 ppt
- H₂O in Ne: 100 ppt
- H₂O in COS: 4 ppb
- H₂O in 10 % GeH₄/90 % H₂: 35 ppb
- H₂O in 1 % GeH₄/99 % H₂: 7 ppb
- H₂O in CO: 600 ppt
- H₂O in Clean Dry Air (CDA): 300 ppt
- H₂O in D₂ (2H₂): 900 ppt
- H₂O in C₄F₆: 150 ppb
- H₂O in C₄F₈: 1200 ppt
- H₂O in C₅F₈: 8 ppb
- H₂O in CO₂: 800 ppt
- H₂O in Ar: 130 ppt
- H₂O in He: 100 ppt
- H₂O in H₂: 200 ppt
- H₂O in O₂: 150 ppt
Operation Range
- H₂O in N₂: 0 - 20 ppm
- H₂O in CO₂: 0 - 25 ppm
- H₂O in Ar: 0 - 9 ppm
- H₂O in He: 0 - 4 ppm
- H₂O in H₂: 0 - 16 ppm
- H₂O in O₂: 0 - 10 ppm
- H₂O in D₂ (2H₂): 0 - 14 ppm
- H₂O in Clean Dry Air (CDA): 0 - 18 ppm
- H₂O in CO: 0 - 24 ppm
- H₂O in 1 % GeH₄/99 % H₂: 0 - 16 ppm
- H₂O in 10 % GeH₄/90 % H₂: 0 - 16 ppm
- H₂O in COS: 0 - 23 ppm
- H₂O in Ne: 0 - 5 ppm
- H₂O in Kr: 0 - 11 ppm
- H₂O in Xe: 0 - 13 ppm
- H₂O in Cl₂: 0 - 25 ppm (corrosion-Resistant material required)
- H₂O in HCl: 0 - 50 ppm (corrosion-Resistant material recommended)
- H₂O in HBr: 0 - 50 ppm (corrosion-Resistant material required)
- H₂O in SF₆: 0 - 15 ppm
- H₂O in NF₃: 0 - 20 ppm
- H₂O in CF₄: 0 - 15 ppm
- H₂O in C₂F₆: 0 - 15 ppm
- H₂O in C₃F₈: 0 - 20 ppm
- H₂O in C₄F₆: 0 - 25 ppm
- H₂O in C₄F₈: 0 - 20 ppm
- H₂O in C₅F₈: 0 - 32 ppm
Precision (1σ, Greater of)
- ± 0.75 % or 1/3 of LDL
Accuracy (Greater of)
- ± 4 % or LDL
Speed of Response
- < 2 minutes to 95 % (with speed+ activated)
Environmental Conditions
- 10° to 40° C, 30 % to 80 % RH, Non-Condensing
Storage Temperature
- -10° to 50° C
Wetted Materials
- 316L Stainless Steel (optional corrosion-resistant material), 10 Ra surface finish
Gas Connections
- 1/4" Male VCR Inlet & Outlet
Leak Tested to
- 1 x 10⁻⁹ mbar l/sec
Inlet Pressure
- 10 - 125 psig (1.7 - 9.6 bar)
Flow Rate
- 0.05 to 1.8 slpm
Sample Gases
- Most inert, passive, toxic and corrosive gases
Gas Temperature
- Up to 60° C
Standard Sensor
- 8.73" x 8.57" x 23.6" (222 mm x 218 mm x 599 mm)
- 28 lb (12.7 kg)
Sensor Rack (Fits up to two Sensors)
- 8.73" x 19.0" x 23.6" (222 mm x 483 mm x 599 mm)
Weight
- Standard sensor: 28 lb (12.7 kg)
Platform
- Maximum series analyzer
Alarm Indicators
- 2 user programmable, 1 system fault, Form C relays
Power Requirements
- 90-240 Vac 50/60 Hz
Power Consumption
- 40 Watts max
Signal Output
- Isolated 4-20 mA per sensor
User Interfaces
- 5.7" LCD touchscreen, 10/100 Base-T Ethernet
- USB, RS-232, RS-485, Modbus TCP (optional)
Data Storage
- Internal or external flash drive
Certification
- CE Mark
Patents
- U.S. Patent # 7,277,177
- High-Purity Gases & Systems
- Research & Development