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UHP Tied-Diaphragm Pressure Regulator (up to 250 psig) - SQ2Micro Series
Brand: Parker Hannifin
SQ2Micro Pressure Regulators are designed for UHP point-of-use applications requiring precision pressure control in a small envelope.
It provides excellent reliability and leak integrity making it ideal for use in critical semiconductor operations.
Specifications
Brand
Body Material
- VeriClean 316L Stainless Steel
Burst Pressure
- 750 psig (52 barg)
Cap Material
- Nickel-Plated Brass
Compression Member Material
- VeriClean 316L Stainless Steel Standard, Hastelloy
Diaphragm Material
- Hastelloy C-22 (Standard), 316L Stainless Steel
External Leak Rate
- < 2 x 10-10 Scc/sec He
Flow Capacity (Cv)
- Cv 0.06 (SQ2Micro)Cv 0.15 (SQ2Micro130E)
Internal Leak Rate
- < 5 x 10- 8 Scc/sec He
Internal Volume (cc)
- 2.56 cc (SQ2Micro)4.21 cc (SQ2Micro130E)
Knob Material
- ABS (Blue) (SQ2Micro)ABS (Black) (SQ2Micro130E)
Maximum Inlet Pressure (psi)
- 250 psig (17 barg)
Maximum Working Temperature (°C)
- 66° C
Maximum Working Temperature (°F)
- 150° F
Minimum Working Temperature (°C)
- -40° C
Minimum Working Temperature (°F)
- -40° F
Nut Material
- Stainless Steel
Outlet Pressure
- -10 - 60 psig (260 Torr - 4.1 barg)
Poppet Material
- Hastelloy C-22 (Standard), 316L Stainless Steel
Proof Pressure
- 375 psig (26 barg)
Seat Material
- PCTFE (Standard), Vespel
Surface Finish (Ra)
- 5 Micro inch Ra
Weight (kg)
- 0.42
Weight (Lbs)
- 0.9